Vacuum Pump Oil Cross Reference Chart

Find OEM vacuum pump oil equivalents, VPS replacement oil options, and genuine OEM oils for Leybold, Edwards, Busch, Welch, Becker, Stokes, and other vacuum pump brands.

Use this guide to match common vacuum pump oils by OEM name, viscosity, oil type, pump family, and application.

Important: Always verify viscosity, pump type, temperature, process conditions, and chemical compatibility before changing vacuum pump oil. If your process involves oxygen service, aggressive chemicals, solvents, specialty gases, or PFPE fluids, contact us before substituting oil.

Best-Selling VPS M-Series Vacuum Pump Oils

For most standard oil-sealed rotary vane vacuum pump applications, the VPS M-Series is the place to start. These mineral vacuum pump oils cover many common Leybold, Edwards, Busch, Welch, Becker, and general industrial vacuum pump oil applications.

VPS M32

Lower-viscosity mineral vacuum pump oil for smaller pumps, colder starts, and applications where lighter oil is specified.

Common cross-reference use: LVO 120-style applications, lighter Edwards oil applications.

Shop VPS M32

VPS M68 Most Popular

General-purpose ISO 68 mineral vacuum pump oil for many rotary vane vacuum pumps.

Common cross-reference use: Leybold LVO 130, LVO 150, Edwards Ultragrade 19/70 direction, Busch ISO 68-style applications.

Shop VPS M68

VPS M100

Heavier ISO 100 mineral vacuum pump oil for pumps and operating conditions requiring more viscosity and sealing support.

Common cross-reference use: Leybold LVO 100, Edwards Ultragrade 20 direction, higher-viscosity rotary vane applications.

Shop VPS M100
Shop All Vacuum Oil Shop M32 Oil Shop M68 Oil Shop M100 Oil Shop S100 Synthetic Ask Us To Cross Reference Your Oil

Leybold Leybonol LVO Oil Cross Reference

Leybold LVO oils are commonly used in Leybold rotary vane pumps, Sogevac pumps, Trivac pumps, and specialty vacuum applications. Use the table below to identify the closest VPS replacement oil or specialty fluid.

Leybold Oil VPS Replacement / Equivalent Oil Type Notes
LVO 100 VPS M100 Mineral Vacuum Pump Oil Common ISO 100 mineral oil direction for many rotary vane applications.
LVO 120 VPS M32 Mineral Vacuum Pump Oil Lower-viscosity mineral oil option. Verify pump model.
LVO 130 VPS M68 Mineral Vacuum Pump Oil Popular Leybold replacement oil direction for many Sogevac and rotary vane applications.
LVO 150 VPS M68 Mineral Vacuum Pump Oil Verify application before substituting.
LVO 300 VPS S100 Synthetic Vacuum Pump Oil Used where synthetic oil is preferred and compatible.
LVO 400 Fomblin Y14/6 PFPE Specialty Fluid Specialty chemical-resistant fluid. Do not substitute without confirming process compatibility.
LVO 410 Fomblin Y25/6 PFPE Specialty Fluid Specialty chemical-resistant fluid. Do not substitute without confirming process compatibility.
LVO 420 Fomblin Y06/6 PFPE Specialty Fluid Specialty chemical-resistant fluid. Do not substitute without confirming process compatibility.
LVO 520 / LVO 521 D704 Diffusion Pump Fluid Diffusion Pump Fluid For diffusion pump applications, not rotary vane pumps.
LVO 140, 170, 200, 210, 211, 220, 240, 250, 260, 310, 320, 330 No standard VPS equivalent listed Specialty / Application Specific Contact us with your pump model, oil name, and process conditions.
LVO 130 replacement note: For many Leybold rotary vane and Sogevac applications, customers commonly look for an LVO 130 equivalent. VPS M68 is the main replacement oil to review for those applications. Confirm pump model and operating conditions before switching.

Edwards Vacuum Pump Oil Cross Reference

Edwards Ultragrade oils are used across Edwards rotary vane pumps, boosters, diffusion pumps, and industrial vacuum systems. The chart below expands the Edwards oil section with common pump applications, viscosity information, and VPS replacement directions.

Edwards Oil Oil Type Viscosity Typical Edwards Pump Applications VPS Replacement / Direction Notes
Ultragrade Performance 15 Mineral Oil 38.1 cSt @ 40°C E2M0.7, E2M1.5, small rotary vane pumps VPS M32 Useful where cold start capability or low starting torque is needed.
Ultragrade Performance 19 Mineral Oil 48.6 cSt @ 40°C RV series, E2M18, E2M28 VPS M68 Common Edwards rotary vane oil direction. Confirm pump and service conditions.
Ultragrade Performance 20 Mineral Oil 103 cSt @ 40°C EH boosters, gearboxes, drive trains, large single-stage rotary vane pumps VPS M100 Heavier mineral oil used where sealing and higher viscosity are required.
Ultragrade Performance 70 Mineral Oil 70 cSt @ 40°C E1M40 through E1M275, E2M40 through E2M275, E2S VPS M68 Large capacity two-stage rotary vane pumps, especially high-load or fast-duty cycles.
Ultragrade Endurance Extend 110 Di-ester Oil 98 cSt @ 40°C nES and E2S pumps Contact us Application-specific synthetic/ester direction. Do not substitute with mineral oil without review.
Ultragrade Kinetic 46 PAO Synthetic 44 cSt @ 40°C EOSi oil sealed screw pumps Contact us Used for oil sealed screw pumps pumping air, inert gases, and water vapor.
Ultragrade Kinetic 150 PAO Synthetic 150 cSt @ 40°C GMB HV30000 and HV40000 boosters/blowers Contact us Industrial booster, blower, and dry pump applications.
Ultragrade Kinetic 220 PAO Synthetic 223 cSt @ 40°C High capacity vacuum boosters and pressure blowers Contact us High-viscosity industrial booster/blower oil.
Fluid 201 / Fluid 201 US Diffusion Mineral 18 cSt @ 40°C / 23 cSt @ 25°C Vapour boosters Review D704 / D705 style diffusion pump fluids For high vacuum industrial diffusion applications where silicone fluids cannot be tolerated.
L9 UHV Fluid Diffusion Synthetic 71.3 cSt @ 20°C Diffstak, nHT, HT diffusion pumps Contact us Specialty UHV diffusion fluid.

Stokes V-Lube OEM Vacuum Pump Oil

Vacuum Pump Supply carries genuine OEM Stokes V-Lube oils for Stokes Microvac oil piston pumps, Stokes Microvane pumps, Stokes boosters, and pressure blower applications.

Important: The Stokes oils listed below are OEM Stokes oils, not VPS replacement equivalents.
Stokes OEM Oil Oil Type Vapour Pressure Viscosity Application Stokes Pump Family Available Sizes / SKUs
V-Lube F OEM Mineral Oil 1.3 x 10-3 mbar @ 20°C 105.4 cSt @ 40°C Oil piston pumps working in standard applications. Stokes Microvac 5 Gal: 254-539-002
55 Gal: 421-780-001
V-Lube G OEM Mineral Oil 1.3 x 10-3 mbar @ 20°C 159.1 cSt @ 40°C Oil piston pumps working in high temperature and high gas load applications. Stokes Microvac 5 Gal: 262-461-003
55 Gal: 421-793-001
V-Lube H OEM Mineral Oil 5 x 10-3 mbar @ 20°C 203.4 cSt @ 40°C High capacity vacuum boosters and pressure blowers. Stokes Boosters 5 Gal: 419-699-001
55 Gal: 419-698-001
V-Lube B OEM Mineral Oil 5.0 x 10-6 mbar @ 20°C 94.3 cSt @ 40°C Single-stage rotary vane pumps requiring heavier grade oil to create a vacuum seal. Stokes Microvane 14–52 5 Gal / 55 Gal

Stokes Microvac Pumps

For Stokes Microvac oil piston vacuum pumps, review OEM Stokes V-Lube F for standard applications and OEM Stokes V-Lube G for higher temperature or heavier gas load service.

Stokes Boosters

For Stokes vacuum boosters and pressure blowers, OEM Stokes V-Lube H is the main oil listed for high capacity booster and blower applications.

Stokes Microvane

For Stokes Microvane 14–52 pumps, OEM Stokes V-Lube B is listed for single-stage rotary vane pump applications requiring heavier grade oil for vacuum sealing.

Busch Vacuum Pump Oil Cross Reference

Common Busch oil replacement direction for rotary vane vacuum pump applications.

Busch Oil / Application VPS Replacement / Equivalent Oil Type Notes
VM 068 / ISO 68 Applications VPS M68 Mineral Vacuum Pump Oil Common oil weight for many Busch R5 rotary vane pump applications.
VM 100 / ISO 100 Applications VPS M100 Mineral Vacuum Pump Oil Verify operating temperature and pump model.
Synthetic Busch Oil Applications VPS S100 Synthetic Vacuum Pump Oil Use only where synthetic oil is appropriate and compatible.

Welch Vacuum Pump Oil Cross Reference

Welch pumps are common in laboratory, university, and research applications. Many oil-sealed Welch pumps use mineral vacuum pump oil.

Welch Oil / Application VPS Replacement / Equivalent Oil Type Notes
General Welch Rotary Vane Oil Applications VPS M68 Mineral Vacuum Pump Oil Common direction for many lab rotary vane applications.
Higher Viscosity Welch Applications VPS M100 Mineral Vacuum Pump Oil Verify model and manual requirements.

Quick Oil Type Guide

Oil Type Best For Common Products
Mineral Vacuum Pump Oil General oil-sealed rotary vane pump service M32, M68, M100
Synthetic Vacuum Pump Oil Higher temperature or longer service interval applications S100 Synthetic
PFPE Specialty Fluids Chemical or oxygen-service applications where standard oils are not suitable Fomblin Y14/6, Fomblin Y25/6, Fomblin Y06/6
Diffusion Pump Fluid High-vacuum diffusion pump systems D704, D705, and other diffusion pump fluids
Flushing Fluid Cleaning oil-sealed pumps before refilling with fresh oil Vacuum Pump Flushing Fluid

Why the Right Vacuum Pump Oil Matters

The correct oil helps protect the pump, improve sealing, maintain vacuum performance, and reduce premature wear. Oil that is too thin, too heavy, contaminated, chemically incompatible, or thermally degraded can shorten pump life and cause poor vacuum performance.

Vacuum Pump Oil Cross Reference FAQ

Which VPS vacuum pump oil should I check first?

For many common oil-sealed rotary vane vacuum pump applications, start with the VPS M-Series: M32, M68, and M100. These cover many common mineral oil applications.

Can I replace Leybold LVO 130 with VPS M68?

VPS M68 is the primary replacement direction for many LVO 130-style mineral oil applications. Always confirm pump model, operating temperature, and process conditions before substituting.

Is LVO 100 the same as M100?

LVO 100 and VPS M100 are both commonly treated as ISO 100 mineral vacuum pump oil applications. Confirm your application before substituting.

Are the Stokes V-Lube oils on this page VPS equivalents?

No. The Stokes V-Lube F, V-Lube G, V-Lube H, and V-Lube B oils listed in the Stokes section are genuine OEM Stokes oils.

Are Fomblin fluids regular vacuum pump oils?

No. Fomblin PFPE fluids are specialty fluids used for chemical-resistant or oxygen-service applications. Do not substitute Fomblin for standard mineral vacuum pump oil unless the pump and process specifically require PFPE fluid.

Can I mix vacuum pump oils?

Do not mix oil types unless compatibility is confirmed. When changing oil type, drain thoroughly and consider using flushing fluid before refilling with fresh oil.

When should I change vacuum pump oil?

Change oil when it becomes dark, milky, contaminated, low, or after pump service. Also change oil after rebuilds, process contamination events, or when vacuum performance begins to drop.

Not sure which vacuum pump oil you need?

Send us your pump model, OEM oil name, current oil part number, or process details and we will help match the correct vacuum pump oil.

Get Help Choosing Oil