Vacuum Pump Oil Cross Reference Chart | OEM & VPS Equivalents
Use Our Full Cross Reference Chart
To simplify oil selection, we’ve created a comprehensive:
? Vacuum Pump Oil Cross Reference Chart
It includes:
- Leybold LVO oils
- Busch equivalents
- Agilent / Varian references
- Becker and Kinney oils
- VPS replacement options
This chart helps ensure correct selection based on viscosity and oil type.
| VPS Replacement Oil | Leybold | Viscosity | Type | Busch | Agilent | Becker | Kinney | Vacuubrand | Precision Plus | Notes |
|---|---|---|---|---|---|---|---|---|---|---|
| VPL M100 | LVO100 | ~103 cSt @ 40°C | Mineral | R-530, KV-100, S | VM100 | VG100, SAE 30 | A102, A111, A120, P3 | B-Oil | PLUS 530, PLUS 77, Lube M100, SS-100 | Offered |
| VPL M32 | LVO120 | 33 cSt | Mineral | — | VM032 | — | — | — | PLUS 100 | Offered |
| VPL M68 | LVO130 / LVO150 | 67 cSt | Mineral | Type AX, SUPER X, LT | SW60, DS19, GPDS19 | VM068 | A100, A119 | — | PLUS 19, PLUS 21, PLUS DUO | Offered |
| VPL S100 | LVO300 | 100 cSt | Food-grade Synthetic | R-570, R-590, VE101, VSL100, VSB100, VSI100 | — | PS-100, SS-100 | — | — | PLUS 570, 590, 210 | Offered |
| VPL D704 | LVO520 / 521 | 40 cSt @ 25°C | Silicone | — | DC704 | — | — | — | PLUS 704 | Offered |
| PPF14 | LVO400 | 50.7 cSt | PFPE | VPA32 | — | — | — | — | Krytox 1514 | Fomblin Y14/6 |
| PPF25 | LVO410 | 87 cSt | PFPE | YLC205B, R-620 | — | — | Y25/6 | — | Krytox 1525 | Fomblin Y25/6 |
| PPF06 | LVO420 | 25 cSt | PFPE | — | — | — | — | — | Y06/6, Krytox 1506 | Fomblin Y06/6 |
Leybold Vacuum Pump Oil Cross Reference
This chart shows available Leybold LVO oils and their corresponding VPS Replacement Oils where applicable. OEM names are used for reference only.
| Leybold Oil | VPS Replacement Oil | Viscosity | Type | Status / Notes |
|---|---|---|---|---|
| LVO100 | VPL M100 | ~103 cSt @ 40°C | Mineral | Leybold oil offered + VPS alternative available |
| LVO120 | VPL M32 | 33 cSt @ 40°C | Mineral | Leybold oil offered + VPS alternative available |
| LVO130 | VPL M68 | 67 cSt @ 40°C | Mineral | Leybold oil offered + VPS alternative available |
| LVO150 | VPL M68 | 67 cSt @ 40°C | Mineral | Leybold oil offered + VPS alternative available |
| LVO300 | VPL S100 | 100 cSt @ 40°C | Synthetic | Leybold oil offered + VPS alternative available |
| LVO400 | PPF14 (PFPE) | 50.7 cSt @ 40°C | PFPE | Leybold oil offered + VPS alternative available |
| LVO410 | PPF25 (PFPE) | 87 cSt @ 40°C | PFPE | Leybold oil offered + VPS alternative available |
| LVO420 | PPF06 (PFPE) | 25 cSt @ 40°C | PFPE | Leybold oil offered + VPS alternative available |
| LVO520 | VPL D704 | 40 cSt @ 25°C | Silicone | Leybold oil offered + VPS alternative available |
| LVO521 | VPL D704 | 40 cSt @ 25°C | Silicone | Leybold oil offered + VPS alternative available |
| LVO140 | — | — | — | Leybold oil offered (no VPS equivalent) |
| LVO170 | — | — | — | Leybold oil offered (no VPS equivalent) |
| LVO200 | — | — | — | Leybold oil offered (no VPS equivalent) |
Always confirm viscosity and oil type per pump manufacturer requirements.