Vacuum Pump Cross Reference Chart | Alcatel, Busch, Becker, Leybold, Edwards, Welch Equivalents

Use this cross-reference page to compare common industrial and laboratory vacuum pump families across Busch, Becker, Leybold, Edwards, Welch, Alcatel / Adixen, and Varian / Agilent.

This page is designed to help buyers, maintenance teams, and lab users identify comparable pump classes by flow, vacuum level, horsepower, and family type before moving into kits, oils, manuals, or replacement direction.

Industrial Cross Reference Lab & Two-Stage Cross Reference Edwards Models Covered How to Use This Page Helpful Links FAQ

Industrial Pump Comparison

Use the first chart for Busch R5, Becker, Leybold SOGEVAC, Rietschle, and Edwards nES / ES style industrial rotary vane pump classes.

Single-stage industrial classes
Packaging and general plant service
Strong fit for service-family comparison

Lab / Two-Stage Pump Comparison

Use the second chart for Edwards RV / E2M / E2S, Leybold TRIVAC, Welch, Alcatel / Adixen, and Varian / Agilent families.

Laboratory and research applications
Analytical and instrumentation service
Deeper vacuum two-stage families

Important: Similar CFM does not automatically mean two pumps are interchangeable. Always verify ultimate vacuum, connections, footprint, motor specs, and application duty before treating any model as a direct replacement.

Industrial Vacuum Pump Cross Reference

Busch R5 vs. Becker, Leybold SOGEVAC, Rietschle, and Edwards industrial classes

This table compares common Busch R5 industrial rotary vane pumps against nearby Becker, Leybold SOGEVAC, Rietschle, and Edwards classes to help identify comparable pump families and service directions.

Busch R5 Model	Nominal Flow (m³/h)	Approx. CFM	HP	Ultimate Vacuum	Becker	Leybold SOGEVAC	Rietschle	Edwards nES / ES	Repair Kits / Parts	Oil	Filters	New Pump / Replacement	Notes
R5 RA 0025 F	25	14.7	~1 HP	0.1 mbar (closed)	U 4.25	SV 25 D	VGD 10 / small VC class	nES25	Busch R5 Parts	Oil	Filters	Replacement Help	Small single-stage industrial class.
R5 RA 0040 F	40	23.5	~1.5 HP	0.1 mbar (closed)	U 4.40 / U 5.40	SV 40 B	VC 50	nES40 / ES40	RA0040 Parts	Oil	Filters	Replacement Help	One of the cleanest industrial crossover rows.
R5 RA 0063 F	63	37.1	~2 HP	0.1 mbar (closed)	U 5.65	SV 65 B	VC 75	nES63 / ES65	RA0063 Parts	Oil	Filters	Replacement Help	Strong mid-small industrial comparison row.
R5 RA 0100 F	100	58.9	~3 HP	0.1 mbar (closed)	U 5.101	SV 100 B	VC 100	nES100 / ES100	RA0100 Parts	Oil	Filters	Replacement Help	Strong four-brand class comparison.
R5 RA 0155 A	155	91.2	~4 HP	0.1 mbar	U 5.165	SV 120 B / SV 220 B	VC 150	nES160 / ES160	RA0155 Parts	Oil	Filters	Replacement Help	Transitional size class.
R5 RA 0165 D	165	97.1	~4 HP	0.1 mbar (closed)	U 5.165	SV 220 B	VC 150 / VC 202	nES160 / ES160	RA0165 Parts	Oil	Filters	Replacement Help	Verify full specs carefully at this size.
R5 RA 0205 D	205	120.7	~5.5 HP	0.1 mbar (closed)	U 5.202	SV 220 B	VC 202	nES200 / ES200	RA0205 Parts	Oil	Filters	Replacement Help	Useful industrial service-class crossover.
R5 RA 0255 D	255	150.1	~7.5 HP	0.1 mbar	U 5.250	SV 300 B	VC 202 / VC 303	nES300 / ES300	RA0255 Parts	Oil	Filters	Replacement Help	Check footprint, motor, and connections.
R5 RA 0305 D	305	179.5	~10 HP	0.1 mbar (closed)	U 5.300	SV 300 B / SV 320 B	VC 303	nES300 / ES300	RA0305 Parts	Oil	Filters	Replacement Help	Best-fit size class, not always exact interchange.
R5 RA 0400 C	400	235.4	~15 HP	0.1 mbar	U 4.400 F/K	SV 320 B / SV 630 B	VC 303 / VC 500	nES400 / ES400	RA0400 Parts	Oil	Filters	Replacement Help	Large industrial class row.
R5 RA 0630 C	630	370.8	~20 HP	0.1 mbar	U 4.630 F/K	SV 630 B	VC 500	nES630 / ES630	RA0630 Parts	Oil	Filters	Replacement Help	Higher-capacity industrial comparison row.

Lab & Two-Stage Vacuum Pump Cross Reference

Edwards RV / E2M / E2S, Leybold TRIVAC, Welch, Alcatel / Adixen, and Varian / Agilent families

This table covers pump families most often compared in laboratory, research, instrumentation, and light process applications.

Edwards Two-Stage Rotary Vane Pumps Covered On This Page

Edwards RV Series: RV3, RV5, RV8, RV12
Edwards E2M Series: E2M1.5, E2M18, E2M28, E2M40, E2M80, E2M275
Edwards E2S Series: E2S85

This page references core model families, not every voltage or motor variant.

Brand	Model	Approx. CFM	Ultimate Vacuum	HP	Comparable Models	Repair Kits / Parts	Oil	Filters	New Pump / Replacement	Notes
Edwards	E2M1.5	~0.9	Deep two-stage lab vacuum	~0.12	Small bench / instrument class	E2M Parts	Oil	Filters	Replacement Help	Very small bench and instrument class.
Alcatel / Adixen	2005	~3.5	~2 × 10⁻³ mbar	~0.5	Varian DS102, Edwards RV3, Leybold D4B	2005 Parts	Oil	Filters	Replacement Help	Good small lab comparison row.
Varian / Agilent	DS102	~3.5	~2 × 10⁻³ mbar	~0.5	Alcatel 2005, Edwards RV3, Leybold D4B	DS102 Parts	Oil	Filters	Replacement Help	Classic small analytical crossover row.
Edwards	RV3	~3.0	Deep two-stage lab vacuum	~0.5	Alcatel 2005, Varian DS102, Leybold D4B	RV Parts	Oil	Filters	Replacement Help	Common small Edwards two-stage family row.
Leybold	D4B	~3	~10⁻³ mbar	~0.5	Edwards RV3, Alcatel 2005	D4B Parts	Oil	Filters	Replacement Help	Small TRIVAC class.
Alcatel / Adixen	2010	~7	~2 × 10⁻³ mbar	~0.75	Varian DS202, Edwards RV5, Leybold D8B, Welch 1402	2010 Parts	Oil	Filters	Replacement Help	Strong small-to-mid lab comparison row.
Welch	1402	5.6	1 × 10⁻⁴ Torr	0.5	Alcatel 2010, Edwards RV5, Leybold D8B	1402 Parts	Oil	Filters	Replacement Help	Popular small Welch row.
Edwards	RV5	~4.7	Deep two-stage lab vacuum	~0.5	Alcatel 2010, Welch 1402, Leybold D8B	RV Parts	Oil	Filters	Replacement Help	Popular Edwards lab model.
Leybold	D8B	~5–6	~10⁻³ mbar	~0.75	Edwards RV5, Welch 1402, Alcatel 2010	D8B Parts	Oil	Filters	Replacement Help	Common small TRIVAC class.
Edwards	RV8	~6.6	Deep two-stage lab vacuum	~0.75	Bridge class between RV5 and RV12	RV Parts	Oil	Filters	Replacement Help	Useful for RV family progression.
Alcatel / Adixen	2015	~13	~1 × 10⁻³ mbar	~1	Varian DS302, Edwards E2M18, Leybold D16B, Welch 1376	2015 Parts	Oil	Filters	Replacement Help	Useful crossover point for mid-size lab pumps.
Welch	1376	10.6	1 × 10⁻⁴ Torr	1	Alcatel 2015, Edwards E2M18, Leybold D16B	1376 Parts	Oil	Filters	Replacement Help	Strong mid-size Welch row.
Leybold	D16B / D16BCS	~11–13	~10⁻³ mbar	~1	Edwards E2M18, Alcatel 2015, Welch 1376	D16B Parts	Oil	Filters	Replacement Help	Include BCS variant coverage.
Edwards	E2M18	~12.7	Deep two-stage lab vacuum	~1	Alcatel 2015, Welch 1376, Leybold D16B	E2M Parts	Oil	Filters	Replacement Help	Common mid-size Edwards row.
Alcatel / Adixen	2021	~21	~1 × 10⁻³ mbar	~1.5	Varian DS402, Edwards E2M28 / RV12, Leybold D25B / D40B, Welch 1397	2021 Parts	Oil	Filters	Replacement Help	Strong higher-capacity lab crossover row.
Welch	1397	17.7	1 × 10⁻⁴ Torr	1	Alcatel 2021, Edwards E2M28, Leybold D25B	1397 Parts	Oil	Filters	Replacement Help	Useful higher-capacity Welch row.
Leybold	D25B / D25BCS	~18–20	~10⁻³ mbar	~1.5	Edwards E2M28, Welch 1397, Alcatel 2021	D25B Parts	Oil	Filters	Replacement Help	Include BCS variant coverage.
Edwards	E2M28	~20	Deep two-stage lab vacuum	~1.5	Alcatel 2021, Welch 1397, Leybold D25B / D40B	E2M Parts	Oil	Filters	Replacement Help	One of the most important higher-capacity rows.
Edwards	RV12	~8.5	Deep two-stage lab vacuum	~1	Upper RV family class	RV Parts	Oil	Filters	Replacement Help	Popular model-specific search.
Edwards	E2M40	~28	Deep two-stage lab / process vacuum	~2	Leybold D40B / D65B range, Alcatel 2033 range	E2M Parts	Oil	Filters	Replacement Help	Bridge between larger lab and light process applications.
Alcatel / Adixen	2033	~35	~1 × 10⁻³ mbar	~2	Edwards E2M40, Leybold D40B / D65B	2033 Parts	Oil	Filters	Replacement Help	Larger lab / process comparison row.
Leybold	D40B / D40BCS	~35	~10⁻³ mbar	~2	Edwards E2M40, Alcatel 2033	D40B Parts	Oil	Filters	Replacement Help	Include BCS variant coverage.
Leybold	D65B / D65BCS	53	1 × 10⁻⁴ mbar	3	Alcatel 2033, Edwards E2M40 / E2M80	D65B Parts	Oil	Filters	Replacement Help	Include BCS variant coverage.
Edwards	E2M80	~50	Deep two-stage lab / process vacuum	~3	Leybold D65B class	E2M Parts	Oil	Filters	Replacement Help	Higher-flow research and process applications.
Edwards	E2S85	~50–60	Deep two-stage vacuum	~3	Larger E2M and D65B-size applications	E2S / E2M Parts	Oil	Filters	Replacement Help	Current Edwards family; review separately from standard E2M assumptions.
Edwards	E2M275	~160–170	Deep two-stage process vacuum	Large industrial motor class	Large process / specialty two-stage applications	E2M Parts	Oil	Filters	Replacement Help	Specialty large-capacity model.

How to Use This Cross Reference Page

Use the data first, then move into service pages and resources

Use CFM / flow to compare pumping speed.
Use ultimate vacuum to compare achievable depth of vacuum.
Use horsepower and family type to judge operating class.
Verify voltage, frequency, connections, and footprint before treating any model as a direct replacement.
Use the linked family pages to move from comparison into repair kits, oils, manuals, and service parts.

Helpful Links

Move from comparison data into service and support pages

Busch R5 Cross Reference

Compare Busch R5 pumps to Becker, Leybold SOGEVAC, Rietschle, and Edwards industrial classes.

View Busch R5 Cross Reference

Leybold TRIVAC Cross Reference

Browse Leybold TRIVAC pump classes including BCS variants and related equivalents.

View Leybold TRIVAC Cross Reference

Edwards Cross Reference

Compare Edwards RV, E2M, and E2S families against nearby equivalent classes.

View Edwards Cross Reference

Alcatel / Adixen Cross Reference

Compare Alcatel / Adixen A, SD, I, C1, C2, and Pascal-family models.

View Alcatel / Adixen Cross Reference

Welch Cross Reference

Compare Welch belt-driven, CRVpro, and 8900-series pump families.

View Welch Cross Reference

Oil Cross Reference

Compare OEM oils and VPS equivalents by viscosity and oil type.

View Oil Cross Reference Chart

Need help identifying an equivalent pump?

Send us your current pump model, application, and any nameplate details you have. We can help point you toward the right repair kit, oil, or replacement direction.

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Brand-Specific Cross Reference Pages

Are these exact one-to-one replacements?

No. These are practical cross-reference comparisons by family and service class. Final selection should always be based on full technical review.

Why are some pumps grouped by family instead of every catalog variant?

Because buyers usually start by identifying the correct pump family and size class before narrowing down voltage, motor, and connection details.

What matters more: CFM or ultimate vacuum?

Both matter. CFM affects evacuation speed, while ultimate vacuum affects how deep the system can pull. The correct balance depends on the application.

Can I use this page to find repair parts too?

Yes. Use the linked family pages and resources to move from pump comparison into kits, oils, manuals, and service parts.